University of Leicester
Browse
Chen_2024_Appl._Phys._Express_17_021001.pdf (1.23 MB)

Higher-order resonance of single-crystal diamond cantilever sensors toward high f‧Q products

Download (1.23 MB)
journal contribution
posted on 2024-03-15, 10:38 authored by Guo Chen, Zilong Zhang, Keyun Gu, Liwen Sang, Satoshi Koizumi, Masaya Toda, Haitao YeHaitao Ye, Yasuo Koide, Zhaohui Huang, Meiyong Liao

MEMS resonant sensing devices require both HF (f) and low dissipation or high quality factor (Q) to ensure high sensitivity and high speed. In this study, we investigate the resonance properties and energy loss in the first three resonance modes, resulting in a significant increase in f‧Q product at higher orders. The third order resonance exhibits an approximately 15-fold increase in f‧Q product, while the Q factor remains nearly constant. Consequently, we achieved an ultrahigh f‧Q product exceeding 1012 Hz by higher-order resonances in single-crystal diamond cantilevers.

Funding

JSPS KAKENHI (Grant Nos. 20H02212, 22K18957, 15H03999)

Bilateral joint research between JSPS/CAS, Advanced Research Infrastructure for Materials and Nanotechnology in Japan (ARIM) of MEXT (JPMXP1223NM5297)

Diamond based nanomaterials for biosensing applications

European Commission

Find out more...

China Scholarship Council (No. 202006400023)

History

Author affiliation

College of Science & Engineering/Engineering

Version

  • VoR (Version of Record)

Published in

Applied Physics Express

Volume

17

Issue

2

Publisher

IOP Publishing

issn

1882-0778

eissn

1882-0786

Copyright date

2024

Available date

2024-03-15

Language

en

Deposited by

Professor Haitao Ye

Deposit date

2024-03-14

Rights Retention Statement

  • No

Usage metrics

    University of Leicester Publications

    Categories

    Licence

    Exports

    RefWorks
    BibTeX
    Ref. manager
    Endnote
    DataCite
    NLM
    DC